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Welcome To Profacture

Type PFTS1A Portable Flow Transfer Standard Based on the MKS Gas Box Rate-of-Rise In Situ Flow Verifier (GBROR), the PFTS1 is a robust, easy-to-use precision flow measurement system. A wheeled, portable caddy with integral tilt stand contains the electronic control unit, one or two calibrated GBROR gas sticks, and a power supply/readout unit for the device under test. Each gas stick contains a specially designed MKS Baratron® capacitance manometer whose accuracy and stability enables this ROR measurement technique to deliver better than 1% of Reading accuracy. All components of the gas stick module are tested and calibrated as a unit to provide maximum performance. In the calibration process, each stick receives a multipoint calibration using several precision flow standards thereby ensuring accuracy across to entire range of the unit. The PFTS1A may be used as a bench test instrument or it may be used on the production floor for in situ testing.

These units currently sell new for well over $25,000 from MKS when configured the same as the listed unit.  This tool was originally sold to Nortel Networks in September, 2000 where it saw little use as the fab for which it was purchased never went into production.  It is in excellent condition and will provide years of service to your fab or calibration house.

Features and Benefits 

• Quickly verifies mass flow controller accuracy and repeatability to within 1% of Reading for any MFC employing +/- 15 VDC power input, and 0-5 VDC set point and output signals
• NIST traceable pressure rate-of-rise technique provides true flow rates, independent of gas species
• May be used for bench or in situ testing
• Wetted materials are compatible with a wide variety of gases
• Unit listed is capable of testing flows from 2 sccm to 20 slm
• Unit listed comes with the optional Mobile Cart and Dry Scroll Pump for oil free operation
• CE compliant - meets requirements for European Union