Welcome To Profacture

Profacture designs, manufactures, assembles and sources  components for Tegal 9XX Series Etchers. We offer complete system support form O-rings to Electrodes to Sheet Metal parts. All parts and assemblies are completely new.

Tegal 900 Series Etchers can be sold as-is or refurbished Refurbished systems are built  to exacting OEM specifications. Installation & warranties are available on all refurbished systems.

• Entire 9XX Spares List or Download PDF File

• Chuck Assembly

  • 901e

  • 903e

• Chamber

  • 901e

  • 903e

  • 915

• Matching Network

• Pressure Module

• Gas Module

• Carriage

• Sender / Receiver

• PM Kits

© Profacture Corporation 2003 All Rights Reserved.

Quality Data Center   Product serial number & password are required

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Tegal 9XX Refurbishment Brochure

• 901 - Nitride/Polysilicon Etch

• 903 - Oxide Etch

• 915/965 - Photoresist Strip/Descum

• Surplus Equipment

  • Tegal (GCA) Chillers

  • MKS Portable Flow Transfer Standard

  • MKS Califlow A-100 Primary Standard Flow Calibrator