Tegal® 9XX Technical Data

Tegal^® 9XX Technical Data

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Products

Tegal^® 9XX Series Etchers

Refurbished Systems

Spares

901

903

915/965

PM Kits

Upgrades

Conversion Kits

Tooling

Technical Data

Services

Tegal^® 9XX Series Etchers

Repairs

RF Match

PC Boards

Module Rebuilds

Field Service

Training

Assembly Drawings

Chamber

Lower Electrode

Display Panel

901e

Table Top, Standard

903e

Table Top, Upgraded

903e

Direct Cooled

TTW, Standard

915e

Technical Information

LED Maps

Block Diagrams

Jumper & Switch Settings

Gas Interface PCB

(99-126-006)

9XXe Gas

9XXe Pressure Range Switch Settings

Spatula Interface PCB (99-247-003)

9XXe Pressure-Vacuum

Micro-P (DACSCAN) Jumper Settings

Shuttle Interface PCB (99-287-003)

9XXe RF Control

9XXe Memory-Baud Expansion PCB Jumper & Switch Settings

Backfill Times

Partial Pressures

Endpoint

900/901/901e

Endpoint Filter Specifications

903/903e

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