Welcome To Profacture

Refurbished Tegal 901e systems provided by Profacture is a diode plasma etcher with a fixed electrode gap. The system is designed around a production-proven transport system that can accommodate 3" to 6" silicon and GaAs substrates. Typical applications for the semiconductor industry include LOCOS nitride etch, nitride contact-via etch (GaAs), zero layer etch, backside etch, isotropic oxide etch, photoresist descum, non-critical polysilicon etch, and titanium-tantalum alloy etch. In general, the 901 is best suited for technology design rules down to 0.5 micron.

• New Pressure & Gas Manifolds
• Atmospheric Sensor
• All New Wiring Harnesses 
• ENI™ RF Generator Interface

The ProFurb™ Refurbishment Process

Systems are completely torn-down to the frame. All sheetmetal, brackets, etc. are sent out for re-plating or replaced with new.

The Chassis is re-assembled with all new hardware. All new ribbon cables are installed & optional new wiring harnesses.

The transport modules are completely rebuilt using new ribbon cables, harnesses, motors, bearings, belts, solenoids, etc. All modules are cycle tested prior to system install.

Following the completion of bench testing and a minimum of 200 wafer cycle placements the transport modules are installed in the system and rough alignment is performed.

The Microprocessor PCB is fully bench & machine tested prior to install.

All that is re-used on the chuck assembly is the mounting brackets. New chuck, bellows ground shield (bowel), cylinders, tubing, fittings, etc. are installed.

Refurbished & chemically cleaned reaction chamber is installed. New electrode, o-rings, ceramic, sapphire rods, etc. are installed.

All stainless covers are re-grained and chemically cleaned. Damaged covers are replaced with new.