Welcome To Profacture

Refurbished Tegal 965e systems provided by Profacture offer the industries largest capacity plasma barrel etcher. With the capacity of six cassettes of 100 mm wafers and four cassettes of 125 mm and 150 mm wafers Through-put is greatly increased. The system has two independen gas inputs and chamber temperature control up to 100 degrees Celsius. Applications include photoresist strip and descum.

• Air-Actuated Chamber Door Opener
• All New PC Boards
• All New Wiring Harnesses 
• ENI™ RF Generator Interface

The ProFurb™ Refurbishment Process

Systems are completely torn-down to the frame. All sheetmetal, brackets, etc. are sent out for re-plating

The Chassis is re-assembled with all new hardware. All new ribbon cables are installed & optional new wiring harnesses.

Reworked or optional new PC boards are then installed and ribbon cables & wiring harnesses are routed using all new tie-downs and clamps

The Front Panel is installed with a refurbished display module and a new fluorescent display & reworked or optional new interface PCB. New Control panel switches are also installed.

Refurbished Gas and Pressure/Vac modules are installed. All new solenoids, tubing, valve internals are used. Reworked or optional new gas interface PCB is installed 

Refurbished & chemically cleaned reaction chamber is installed. All new heaters, ceramics, quartz, o-rings, endpoint photocell and TC's  are used in the process.

Refurbished Matching Network is installed. New inductor, air cap, fixed caps, inter-connect cables, motors, belts and plastic. Optional RF interface installed for use with an ENI ACG-10B RF Generator.

All stainless covers are re-grained and chemically cleaned. Damaged covers are replaced with new.